MEMS & Microsystems by Santiram Kal (IIT Kharagpur)

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source: nptelhrd     2008年5月1日
Electronics - MEMS & Microsystems by Prof. Santiram Kal, Department of Electronics & Electrical Communication Engineering, IIT Kharagpur.

Lecture - 1 Introduction to MEMS & Microsystems 59:42
Lecture - 2 Introduction to Microsensors 59:48
Lecture - 3 Evoluation of MEMS, Microsensors, Market Survey 59:42
Lecture - 4 Application of MEMS 59:42
Lecture - 5 MEMS Materials 59:58
Lecture - 6 MEMS Materials' Properties 59:41
Lecture - 7 MEMS Materials Properties (Contd.) 1:00:50
Lecture - 8 Microelectronic Technology for MEMS - II 59:53
Lecture - 9 Microelectronic Technology for MEMS - III 59:48
Lecture - 10 Micromachining Technology for MEMS 59:47
Lecture - 11 Micromachining Process 59:53
Lecture - 12 Etch Stop Techniques and Microstructure 59:50
Lecture - 13 Surface and Quartz Micromachining 59:50
Lecture - 14 Fabrication of Micromachined Microstructure 59:52
Lecture - 15 Microstereolithography 59:53
Lecture - 16 MEMS Microsensors Thermal 59:52
Lecture - 17 Micromachined Microsensors Mechanical 59:56
Lecture - 18 MEMS Pressure and Flow Sensor 59:52
Lecture - 19 Micromachined Flow Sensors 59:48
Lecture - 20 MEMS Inertial Sensors 59:45
Lecture - 21 Micromachined Microaccelerometers for MEMS 59:54
Lecture - 22 MEMS Accelerometers for Avionics 59:52
Lecture - 23 Temperature Drift and Damping Analysis 59:47
Lecture - 24 Piezoresistive Accelerometer Technology 59:41
Lecture - 25 MEMS Capacitive Accelerometer 59:54
Lecture - 26 MEMS Capacitive Accelerometer Process 59:40
Lecture - 27 MEMS Gyro Sensor 59:53
Lecture - 28 MEMS for Space Application 59:48
Lecture - 29 Polymer MEMS & Carbon Nano Tubes CNT 59:52
Lecture - 30 Wafer Bonding & Packaging of MEMS 59:50
Lecture - 31 Interface Electronics for MEMS 59:47
Lecture - 32 MEMS for Biomedical Applications (Bio-MEMS) 59:47